The ENVIRO Advanced Dry Strip System is a solvent and acid-free photo-resistant stripper and residue removal tool. It eliminates the need for wet stripping processes which use hydroxyl-amine-based solvents. Since traditional acid treatments are unnecessary, there are no hazardous chemical waste materials to store or dispose of, increasing safety. Instead, the ENVIRO system uses a multi-chamber, single-wafer dry resist polymer-removal process that incorporates microwave downstream and low-energy RIE plasma. Environmentally friendly and cost-effective, it increases production with shorter process times.

ULVAC Technologies Inc., 401 Griffin Brook Drive, Methuen, MA 01844; 978/686-7550.